Amorphous carbon (a-C) films were deposited at constant and gradient substrate bias using magnetron sputtering. The influence of applied substrate bias on the microstructure, chemical bonding, corrosion resistance and electrical conductivity of a-C films was investigated. The a-C film obtained at a gradient substrate bias of 120-60 V (V120-60) shows smooth surface morphology, dense multilayer and fine columnar structures, similar to the samples prepared at constant bias of 120 V (V120). AFM results indicate that V120-60 has the lowest surface roughness (Ra=1.79nm). The current density of V120-60 is 0.664 × 10-6 A/cm2 at the applied 0.6 VSCE after potentiodynamic polarization testing, which is almost half of that of V60 (1.13 × 10-6 A/cm2). The initial interfacial contact resistance of V120-60 is 12.22 mΩ·cm2, which is about half of that of V120 (21.80 mΩ·cm2) and close to that of V60 (10.54 mΩ·cm2). It is found that the proper balance between the corrosion resistance and interfacial conductivity was achieved in V120-60 due to the increasing sp2-C/sp3-C ratio from substrate to surface. Therefore, the present strategy with decreasing gradient substrate bias is expected to be a practical improvement process for modifying the properties of a-C films on bipolar plates. This research contributes to enhancing the performance and lifespan of energy storage and conversion devices, such as fuel cells and supercapacitors.

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