The interest in using fluidic devices as replacements for electronic logic circuit devices has seen renewed interest as NASA looks for ways to operate in harsh interplanetary environments. The size, multi-layer capabilities and ability to incorporate fluidic channels in a ceramic substrate make Low Temperature Co-Fired Ceramics (LTCC) a viable platform for development of these fluidic devices. Fluidic oscillators and fluidic diodes are being developed at BSU in LTCC. Fluidic oscillators can be used for measuring flow rates, fluid viscosity as well as a replacement for electronic oscillators. Fluidic diodes can be used as check-valves or as replacements for electronic diodes. In this work, we will describe the development and testing of a fluidic oscillator in LTCC.

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© 2011 International Microelectronics Assembly and Packaging Society
2011