Plasmon Rulers for 3D IC Alignment

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Research Article| January 01 2017

Hao Jiang;

Hao Jiang

Simon Fraser University, NanoMedia Solutions, Vancouver, BC, Canada

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Jasbir N. Patel;

Jasbir N. Patel

Simon Fraser University, NanoMedia Solutions, Vancouver, BC, Canada

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PubMed

Bozena Kaminska

Simon Fraser University, NanoMedia Solutions, Vancouver, BC, Canada

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Additional Conferences (Device Packaging, HiTEC, HiTEN, and CICMT) (2017) 2017 (DPC): 1–20.

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