Flip chip thermosonic back end assembly method is a low cost clean gold to gold interconnection method. The advancement of flip chip thermosonic process for CSP packaging of HBLED and CMOS image sensors is occurring due to the precision intermetallic clean interconnection properties and ability to provide a small form factor packaging to consumer products. This paper will investigate thermosonic metal to metal interconnection process for these high growth assembly markets.

Thermosonic bonding uses a micro weld interconnection die attach method at lower bonding temperature (150°C). The thermosonic metal to metal interconnection method is lead free and the process does not use flux or solder alloys. Thermosonic flip chip die attach process uses a robust individual die “scrubbing” process which reduces assembly steps and eliminates the mass reflow oven used commonly in C4 solder process.

The metal to metal interconnection method provides excellent thermal performance for HBLEDs which require the Tj peak temperature to be controlled to maximize device MTBF and overall color temperature performance. The uses of metal to metal interconnection method provide superior thermal performance when compared to solder alloys.

The metal to metal interconnection method provides high precision with low particle generation for high performance bonding of CMOS image die using a low-k dielectric wafer. The line spacing for the substrate is 50 μm / 50 μm. Stud bumping machines have a ball placement accuracy of +/− 2.5 μm. Thermosonic GGI die bonders have a mounting accuracy of +/−7 μm.

Thermosonic bonding has fast process bonding times of < 500 msec which is important productivity factor in cost sensitive cell phone camera and flash modules.

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