High Frequency Measurement Techniques for On-Chip Inductors

This paper presents high frequency measurement techniques of on-chip inductors in giga Hertz range for wireless communication products. The on-chip inductors were fabricated on high resistive substrate to reduce loss. We compared several different on-chip inductors for self-resonance frequency and quality factors. The collection of measurement data could be used for the guideline of designing practical spiral inductors for wireless applications.