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Piotr Mackowiak
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Journal Articles

Electrical Characterization of Low Temperature PECVD Oxides for TSV Applications

Open Access
Piotr Mackowiak, Rachid Abdallah, Martin Wilke, Jash Patel, Huma Ashraf ...
Journal: International Symposium on Microelectronics
International Symposium on Microelectronics (2018) 2018 (1): 000728–000733.
https://doi.org/10.4071/2380-4505-2018.1.000728
Published: 01 October 2018
View articletitled, Electrical Characterization of Low Temperature PECVD Oxides for TSV Applications
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Journal Articles

BCB-Based Dry Film low k Permanent Polymer with sub 4-μm Vias for Advanced WLP and FO-WLP Applications

Open Access
Michael Toepper, Tanja Braun, Robert Gernhardt, Martin Wilke, Piotr Mackowiak ...
Journal: International Symposium on Microelectronics
International Symposium on Microelectronics (2015) 2015 (1): 000079–000085.
https://doi.org/10.4071/isom-2015-TP33
Published: 01 October 2015
View articletitled, BCB-Based Dry Film low k Permanent Polymer with sub 4-μm Vias for Advanced WLP and FO-WLP Applications
Open the PDF for BCB-Based Dry Film low k Permanent Polymer with sub 4-μm Vias for Advanced WLP and FO-WLP Applications in another window