Traces of undesired materials in semiconductor devices are a serious processing deficiency and their elimination is widely sought. To this end, the effects of semiconductor reagents on discs molded from commercial materials of construction—perfluoroalkoxy (PFA) fluorocarbon resin and polyvinylidene fluoride (PVDF)—were assessed by measuring retained physical properties and by analytical microscopic inspection. At the National Bureau of Standards, Center for Analytical Chemistry, ultrapure nitric acid was stored, in a class 10 environment, in a container molded from PFA, and the level of leachable selected trace metallics was determined by graphite furnace atomic absorption spectrometry, flame emission spectrometry with repetitive optical scanning, and isotope dilution spark source mass spectrometry. The results from the exposure tests indicated that PVDF was significantly affected in the exposures; PFA was essentially unaffected. The amounts of leachable metallics from PFA were at or below low part-per-billion levels, since they were indistinguishable from those in the extractant blank.
Skip Nav Destination
Article navigation
1 July 1985
This article was originally published in
The Journal of Environmental Sciences
Research Article|
September 21 2006
Preliminary Studies of the Effects of Semiconductor Reagents on Polymers Containing Fluorine and of Trace Metallic Leachate from Molded Fluorocarbon Resin
John Imbalzano;
John Imbalzano
1
E. I. DuPont DeNemours, Inc., Wilmington, Delaware
Search for other works by this author on:
John Moody
John Moody
2
National Bureau of Standards, Gaithersburg, Maryland
Search for other works by this author on:
Journal of the IEST (1985) 28 (4): 53–58.
Citation
John Imbalzano, John Moody; Preliminary Studies of the Effects of Semiconductor Reagents on Polymers Containing Fluorine and of Trace Metallic Leachate from Molded Fluorocarbon Resin. Journal of the IEST 1 July 1985; 28 (4): 53–58. doi: https://doi.org/10.17764/jiet.1.28.4.w2271q71727q4716
Download citation file:
Sign in
Don't already have an account? Register
Client Account
You could not be signed in. Please check your email address / username and password and try again.
Could not validate captcha. Please try again.
Sign in via your Institution
Sign in via your Institution
2
Views
Citing articles via
Get Email Alerts
2
Views
Citing articles via
A New Method Using Pseudovelocity-Based Fatigue Analysis to Determine the Effectiveness of Acoustic Fields Used for Acoustic Testing
Marcos A. Underwood, PhD, Marc D. Lamparelli
Progression of Cleanroom Standards Development, 1959-1970s
Clifford “Bud” Frith
Evaluation of Copper and Gold Wire Bonds in PEM Devices
Brian Myer, Eric Gallardo, Dustin Aldridge, Stephen Melosky
Initial Development of a High-Power Solid-State Solar Simulator
Wyatt Felt, Kevin Marriott, Trenton Griffiths, Charlotte Murphy, Bryce Lembke, Nathaniel Morris