A precise calibration technique has been developed to generate count calibration data for a variety of light-scattering instruments used in the electronics industry for monitoring particle levels. This new calibration technique uses Polystyrene latex (PSL) spheres of various sizes as a primary challenge source. SEM techniques are employed to compare actual challenge levels to instrument responses. This technique is useful for calibration of both liquid and aerosol optical particle counters. Data on aerosol particle counters are the subject for future presentation. Liquid count calibration data are presented.

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