The surface roughness of high purity gas system distribution materials is a matter of concern for many critical manufacturing processes. Control of this roughness is thus much in demand and requires a sensitive measurement method. A refined fractal-based characterization is presented as a possible solution. Test data that use this method to compare various surface finishes and correlate roughness with surface cleanability are offered with explanations. This could become an effective quality assurance tool in those applications where surface roughness is important.

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