A nonvolatile residue monitor was used to determine the cleanliness levels of deionized water, pure solvents, and solutios used to measure surface cleanliness by extraction. The measurement is rapid, repeatable, and simple to perform. With the use of calibration curves, it provides a quantitative measure of nonvolatile residue (NVR). This method can be used to replace other procedures that require evaporation of large volumes of solvent, saving time and reducing solvent emissions. The detection limit is in the nanogram range for many common nonvolatile residues.

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