Uniformity of airflow distribution in a unidirectional flow cleanroom has been studied experimentally and numerically. The influence of the height of the plenum chamber and the velocity of airflow introduced into the chamber on the airflow uniformity are investigated experimentally. In addition, a numerical simulation method to predict airflow uniformity is proposed, taking into account the characteristics of the pressure loss of the filter. The calculation domain in this study includes not only the cleanroom but also the plenum chamber and the exhaust chamber. The validity of the numerical method is also verified by comparing the simulation results with the experiments. Finally, the numerical method is used to obtain an appropriate height for the plenum chamber.
Effect of Plenum Chamber Configuration on Airflow Uniformity in Unidirectional Flow Cleanrooms
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Guoping Xie, Yoshihide Suwa; Effect of Plenum Chamber Configuration on Airflow Uniformity in Unidirectional Flow Cleanrooms. Journal of the IEST 1 July 1994; 37 (4): 21–27. doi: https://doi.org/10.17764/jiet.126.96.36.19951t2g562507628
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