Many new cleanroom facilities are being designed and constructed using various minienvironment concepts. This paper presents facility concepts that are being implemented today and those that will be implemented in future construction. The author will present factors and issues that lead owners to the decision to use minienvironments. Also included is the impact of the decision on facility design. A comparison of various designs (including first cost and operating cost) will be presented. Case studies will show the advantages of implementing minienvironments, flexibility issues, and how to best take advantage of the potential operating cost savings.

This content is only available as a PDF.
You do not currently have access to this content.