Particle formation of LMCS (low-molecular-weight poly-cyclo-dimethyl-siloxane) outgassed from silicone sealants by a corona-discharge ionizer was studied by measuring the number concentration and size distribution of formed particles as well as by qualitative analyses of formed particles with FT-IR (Fourier transformation infrared spectroscopy). Further, the influence of humidity and oxygen on the particle formation was investigated to find the reaction mechanisms. As a result, it was found that the LMCS is polymerized to form particles with two different reaction paths and that the LMCS is one of the major species that contribute to the formation of silicon-containing particles in cleanroom environments.

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