An on-line monitor that can perform rapid trace detection of polar organics such as acetone and isopropanol in ultrapure water (UPW) is necessary to efficiently recycle water in semiconductor manufacturing facilities. The detection of these analytes is problematic due to their high solubility in water, resulting in low partitioning into sensor coatings for direct water analysis or into the vapor phase for detection by vapor phase analyzers. After considering various options, two conventional laboratory techniques have been evaluated: gas chromatography and ion mobility spectroscopy. In addition, optimizations of sensor coating materials and sample preconditioning systems were performed with the goal of a low-cost, chemical sensor system for this application. Results from these evaluations, including recommendations for meeting the needs of this application, are reported.
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Peer-reviewed Technical Papers|
October 17 2005
Development and Evaluation of On-Line Detection Techniques for Polar Organics in Ultrapure Water
Gregory Frye;
Gregory Frye
1
Sandia National Laboratories Albuquerque, New Mexico
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Dianna Blair;
Dianna Blair
1
Sandia National Laboratories Albuquerque, New Mexico
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Thomas Schneider;
Thomas Schneider
1
Sandia National Laboratories Albuquerque, New Mexico
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Curtis Mowry;
Curtis Mowry
1
Sandia National Laboratories Albuquerque, New Mexico
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Chris Colburn;
Chris Colburn
1
Sandia National Laboratories Albuquerque, New Mexico
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Robert Donovan
Robert Donovan
1
Sandia National Laboratories Albuquerque, New Mexico
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Journal of the IEST (1996) 39 (5): 30–37.
Citation
Gregory Frye, Dianna Blair, Thomas Schneider, Curtis Mowry, Chris Colburn, Robert Donovan; Development and Evaluation of On-Line Detection Techniques for Polar Organics in Ultrapure Water. Journal of the IEST 1 September 1996; 39 (5): 30–37. doi: https://doi.org/10.17764/jiet.2.39.5.u05j6876635201x8
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