One environmental parameter that is increasingly targeted for tighter control in semiconductor cleanrooms is airborne molecular contaminants (AMC). The biggest problem today is not whether specified levels of AMC can be achieved, but whether they can be accurately measured to ensure compliance with any standards or control criteria. A number of manufacturers are turning to environmental classification via reactivity (or corrosion) monitoring. This paper describes reactivity monitoring and examines its use for:

• Performing environmental assessments in cleanrooms as part of contamination control programs based on the presence (or absence) of corrosive AMC.

• Providing the short-term data required to manage and mitigate contaminant-specific episodes.

• Evaluating long-term air quality trends in a facility.

• Conducting research studies designed to determine relationships, if any, between contaminant levels and possible damaging effects.

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