Acommercial Computational Fluid Dynamic (CFD) software program was used to analyze the flow field inside a cleanroom ceiling plenum. The design required restricted space for the HVAC equipment. The effect of the number of cells used in the computational model on the simulation output was investigated. Pressure and velocity fields were examined. A comparison of flow distribution uniformity between a reference ceiling plenum system and a ceiling plenum system containing more ducted air supplies was made. An analysis of the effect of diffusion plates was conducted.

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