The concentration of organic compounds in a newly constructed cleanroom has been measured as a function of time after completion of the interior finish work. To identify the origin of organic contamination in the cleanroom, outgassing tests of each construction material were performed. The concentration of organic compounds in the cleanroom decreased rapidly during the first month after completing the interior finish work, and decreased gradually to a constant level after about four months. A primary source of the organic contamination was identified as 2-ethyl-1-hexanol generated from the plasticizer used for vinyl curtains and floor materials. The concentration of organic compounds in the cleanroom can be estimated by using the outgassing rates of the compounds from each construction material and its area.

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