This paper will discuss various differential pressure situations, and the ramifications of negative differential pressure. Empirical data will be used to illustrate the anomalies that occur when less than optimal differential pressure conditions exist. The paper will also differentiate between "ballrooms" and "bay and chase" cleanrooms and the effects of isolation enclosures on tools in varied conditions. The purpose of this paper is to educate the reader on airflow optimization for increased facilities performance.
The Effects of Ambient Differential Pressure on Minienvironments, Isolation Enclosures, and Laminar Flow Devices
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John Walters; The Effects of Ambient Differential Pressure on Minienvironments, Isolation Enclosures, and Laminar Flow Devices. Journal of the IEST 14 September 2002; 45 (1): 106–112. doi: https://doi.org/10.17764/jiet.45.1.fv7g6l7520n32585
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