A recently developed nonflammable ceramic chemical filter1 provides an alternative to conventional charcoal filters for removing organic airborne molecular contamination2 in cleanroom applications. The ceramic chemical filter is applicable in mini-environments and clean enclosures to handle manufacturing processes of less than 0.1 μm design and 300 mm wafer.
Ceramic Chemical Filter for Removal of Organic Contaminants
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Soichiro Sakata, Hideto Takahashi, Katsumi Sato, Atsushi Takahashi; Ceramic Chemical Filter for Removal of Organic Contaminants. Journal of the IEST 14 September 2003; 46 (1): 59–65. doi: https://doi.org/10.17764/jiet.46.1.p166m0528hhj0533
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