Numerous manufacturing processes require extremely low levels of nanoparticulate contamination to ensure product quality. While modern filters efficiently remove nanoparticles, online monitoring of the cleanliness of possibly reactive process gases is frequently necessary for quality control purposes. For most manufacturing processes, product quality depends on the concentration of particles above a specific threshold size. This paper will describe how to design an online nanoparticle monitoring system (NMS) for reactive (and inert) process gases from commercially available components, and will discuss how to adapt this system to varying process requirements, such as particle threshold size, and type and pressure of process gas. This paper will also describe a method to determine experimentally the performance of an NMS to ensure quality control.

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