The possibility of dividing working areas by airflow velocity differences in a cleanroom with fan-filter unit (FFU) systems was investigated. Without physical partitions, the cleanroom area was divided into working and non-working areas defined by the FFU exit flow velocities, which were maintained at constant value in the working areas and reduced in the non-working areas. As uniform micro-sized particles were released from a particle generator in the non-working area, the concentrations of particles in the working area were monitored by a particle counter. The results showed that high downward flow velocity in the working area can effectively prevent particles from spreading. The results also suggested an optimum velocity ratio of 20% between adjacent flow regions, in terms of the balance between energy savings and the effective partition insulation.
The Feasibility of Differential Flow Velocity Dividing Working Areas in a Cleanroom
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Juhn-Jie Chen, Ming-Shan Jeng, Chao-Ho Lan, Yan-Ching Lee; The Feasibility of Differential Flow Velocity Dividing Working Areas in a Cleanroom. Journal of the IEST 14 September 2004; 47 (2): 39–47. doi: https://doi.org/10.17764/jiet.47.2.k46157w550228238
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