Semiconductor production and other advanced technology facilities are often designed in two states, the "base-build" state and the "hook-up" state. The base-build state, which after completion is termed "as-built" by the International Organization for Standardization (ISO)1, includes the design and construction of the shell structure and all architectural, mechanical, electrical, and process systems needed for building operation. The hook-up state includes the installation of the production tools and their local support equipment (dry pumps, piping attachments, etc.). During the project design, cleanroom environment vibration and noise requirements are often assigned for compliance in the as-built state only (before tool hook up), since often a different design team or construction team or both is involved in the hook-up state and the base-build design team has little control of operational vibration and noise levels. This paper discusses typical changes, or maturation, in the production vibration environment after the as-built state. In these mature states, identified by ISO as "at rest" and "operational," there is usually an increase in environmental vibration and noise levels with the addition of tools and tool support equipment. This paper also discusses the role of maturation in building mechanical equipment as well as the means of controlling the increase in vibration.

This content is only available as a PDF.
You do not currently have access to this content.