A minienvironment is a localized environment created by an enclosure to isolate a product or process from the surrounding environment. Minienvironments have been gaining popularity as a means to provide effective containment for critical contamination control. The use of minienvironments can provide several orders of magnitude improvement in particle cleanliness levels, while energy intensity may be shifted from the conventional cleanroom systems to the minienvironments that enclose specific processes. Prior to this study, there was little information available or published to quantify the energy performance of minienvironment systems. This paper will present quantitative results from a recent study of the operation performance of an open-loop minienvironment air system in a ballroom setting, including quantification of operation range, energy performance index, pressure control, electric power density, and airflows. The paper also provides a comparison of the newly measured results from this study with previously measured cleanroom performance. The results can serve as a starting point for identifying areas for energy savings from applying high-performance minienvironments in cleanrooms.

This content is only available as a PDF.
You do not currently have access to this content.