New buildings focused on the practice of nanotechnology reflect a pressing need to develop advanced techniques to enable reliable work at the nanoscale. Often when planning a nanotechnology building, a decision must be made to include high-accuracy nanometrology rooms. The purpose of these rooms is to provide high-quality space that can be utilized on a daily basis to facilitate experiments requiring nanoscale precision, to develop new instrumentation, and to develop new techniques capable of probing the nanoscale. Typically, these rooms reduce vibration (including acoustic noise) and electromagnetic interference to very low levels while maintaining a high level of temperature stability. This study describes the characterization and performance of the Kevin G. Hall Nanometrology Laboratory located in the Birck Nanotechnology Center at Purdue University.

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