For 25 years, Draper Laboratory has been active in the areas of microelectromechanical systems (MEMS) and multichip modules (MCM), using two separate laboratories. When these laboratories were constructed, cleanroom technology was in its mid-life cycle. To meet evolving R&D needs, the cleanroom facilities recently underwent a major renovation as described in this article.
Case Study: Design and Construction of the Draper Laboratory Microfabrication Center
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Richard Morrison, Livia Racz, David Carter; Case Study: Design and Construction of the Draper Laboratory Microfabrication Center. Journal of the IEST 1 March 2013; 56 (1): 3–16. doi: https://doi.org/10.17764/jiet.56.1.t755m81670245652
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